SAW Devices - A Comprehensive Review
J. Environ. Nanotechnol., Volume 3, No 3 (2014) pp. 106-115
Abstract
Surface Acoustic Waves (SAWs) are elastic waves travelling along the surface of solid piezoelectric materials with amplitude that decays exponentially with depth. Using an Interdigital Transducer (IDT), these waves can be demonstrated and reproduced in the laboratory in devices called SAW devices. Such devices find many applications as delay lines, filters, resonators and sensors. The present paper provides a snapshot review and description of the functioning, operation and latest technical advancements seen in these devices over the period from 2003-2012. For improvement in design, development, fabrication and characterization of these devices, computational modeling plays a prominent and pivotal role. Employing unique custom made software algorithms based on well established principles of physics, these devices are accurately modeled and simulated and a short review and description of the strategy adopted for the same is also provided.
Full Text
Reference
Ballantine, D. S., White, R. M., Martin. S. J., Ricco, A. J., Zellers, E. T., Frye, G. C. and Wohltjen, H., Acoustic Wave Sensors: Theory, Design and Physico-Chemical Applications, Academic Press, San Diego, CA (1997). Bowers, W., Chuan. R. and Duong, T., Review of Scientific Instruments, 62(6), 1624-1629 (1991).
Tseng, C. C., Frequency response of an interdigital transducer for excitation of surface elastic waves, IEEE Trans. Electron Devices, 15, 586-594 (1968).
Dominique Rebiere, Corinne dejous, Jacques pistre and Jean - Louis Aucouturier, Acoustic wave devices to measure gas flow: comparison between SAW and Shear horizontal acoustic plate mode oscillators, Sensors and Actuators A, 384-388 (1994).
doi:10.1016/0924-4247(94)80017-0
Donald, C., Malocha, Mark Gallagher, Brian Fisher, James Humphries, Daniel Gallagher and Nikolai Kozlovski, A Passive Wireless Multi-Sensor SAW Technology device & system Perspectives", Sensors,13,5897-5922(2013).
doi:10.3390/s130505897
Dong CHEN, Jiexiong DING, Li DU, Guangmin LIU and Jianguo HE, A wireless thin contact stress sensor based on surface acoustic wave resonator in ZnO/Si structure", IEEE International Conference on Instrumentation, Measurement, Computer, Communication and Control, 50-53 (2011).
F.Sidek, A. N., Nordin, M. E., Zaghloue, Development of an RF-CMOS surface acoustic wave resonator", IEEE International Midwest Symposium on Circuits and Systems, 1-4 (2011).
Fabio Cenni, Jeremie Cazalbou, Salvador Mir, Libor Rufer, Design of a SAW based chemical sensor with its microelectronics front end face, Microelectronics Journal, 7, 723-732, (2010).
doi:10.1016/j.mejo.2010.06.008
Hechner, J., and Soluch, W., Pseudo surface acoustic wave dual delay line on 410YX LiNbO3 for liquid sensors, Sensors and ActuatorsB, 111, 436-440 (2005).
doi:10.1016/j.snb.2005.03.042
Jerzy FILIPIAK, Lech SOLARZ, and Grzegorz STECZKO, Surface Acoustic Wave Stress Sensors - Designing Analysis, Molecular & Quantum Acoustics, 28, 71-80 (2007).
Ji Wang, Zhan li nad Jianke Du, "A two dimentional analysis of the effect of periodic electrodes on surface acoustic wave resonators", IEEE Frequency control Symposium and Exposition, 161-164 (2006).
Jingze Tian, Q., Zhang, Q., Zhou, S. F., Yoon, J. and Ahn, Effects of Si3N4 and DLC passivation layers on characteristics of SAW filters, Diamond & Related Materials, 179–182 (2005).
doi:10.1016/j.diamond.2004.10.004
King-Yuen Wong and Wai-Yip Tam, Analysis of the frequency response of SAW filters using finite difference time domain method, IEEE Transactions on Microwave theory and Techniques, 53(11), 3364-3370 (2005).
doi:10.1109/TMTT.2005.858385
Kiyoharu Tagawa, Mikiyasu Masuoka, Masahiko Tsukamoto, Robust optimum design of SAW filters with the Taguchi method and a Memetic Algorith, IEEE Conference Publications, 2146-2153, (2005).
Levit.N, Pestov, D, Tepper, G, Sensors and Actuators B: Chemical 82 (2), 241–249 (2002). Lord Rayleigh, On waves propogating along the plane surface of an elastic solid, Proc London Math soc, 17, 04-11(1885).
doi:10.1112/plms/s1-17.1.4
Marc Loschonsky, David Eisele, Armin Dadgar, Alois Krost, Sylvain Ballandras and Leonhard Reindl, Investigations of a-plane and c-plane GaN based synchronous surface acoustic wave resonators, IEEE Frequency Control Symposium, 320-325 (2008).
Mitsutaka Hikita, Hiroomi Kojima, Toyoji Tabuchi, and Yasuaki Kinoshita, 800 MHz high performance SAW filter using new resonant configuration", IEEE Transactions on Microwave theory and Techniques, 33(6), 510-518 (1985).
doi:10.1109/TMTT.1985.1133107
Pierce, J. R., "Coupling of modes of propagation", Journal of Applied Physics, 25(2), 179-183 (1954).
Smole, P., Ruile, W., Korden, C., Ludwig, C., Krassnitzer, S., and Pongratz, P., Fabrication techniques for tunable surface acoustic wave resonators on giant E layers, IEEE Ultrasonics Symposium, 114-117 (2003).
Tancrell, R. H., and Holland, M. G., Acoustic surface wave filters, Proceedings of the IEEE, 59, 393-409 (1971).
doi:10.1109/PROC.1971.8180
White, R. M., Surface elastic-wave propagation and amplification, IEEE Trans. Electron Devices, 14, 181-189 (1967).
Webster, R. T., 1.5 GHz GaAs Surface Acoustic Wave Delay Lines, IEEE Transactions on Microwave theory and techniques, 33(9), 824-827 (1985).
doi:10.1109/TMTT.1985.1133139
Roshan Kshetrimayum, R. D. S. and Yadava, R. P., Tandon, Modelling electrical response of polymer - coated SAW resonators by equivalent circuit representation, Ultrasonics, 547-553 (2011).
doi:10.1016/j.ultras.2010.12.006
Salut, R., Ballandras, S., Assouar, B., Elmazria, O., Gesset, C., Saada, S., Bergonzo, P., Benedic, F., Omnes, F., Yantchev, V., Kartadjiev, I., Edon, V. and Remiens, D., Fabrication of GHz range oscillators stabilized by Nano -carbon-Diamond-based surface acoustic wave resonators, IEEE International Ultrasonic Symposium Proceedings, 927-930 (2009).
Tooru Nomura, Masaaki Takebayashi, and Atsushi Saitoh, Chemical Sensor Based on Surface Acoustic Wave Resonator Using Langmuir-Blodgett Film, IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 45(5), 1261-1265 (1998).
doi:10.1109/58.726452
Venkatesan, T. and Haresh Pandya, M.,"Surface Acoustic Wave Devices and Sensors- A short review on Design and Modelling by Impulse Response", Journal of Environmental Nanotechnology, 2, (3), 81-90 (2013).
doi:10.13074/jent.2013.09.132034
Vetelino, K. A., Story, P. R., Mileham, R. D., Galipeau, D. W., Sensors and Actuators, B. Chemical, 35, 91–98, (1996). Ville Viikari, Kimmo Kokkonen, Johanna Meltaus, and Heikki Seppa, Estimation for reflective delay line type SAW sensors, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 56(6), 1277-1281 (2009).
doi:10.1109/TUFFC.2009.1170
Smith, W. F. P. W. R., Fundamental and harmonic frequency circuit-model analysis of interdigital transducers with arbitrary metallization ratios and polarity sequences, IEEE Trans., 23, 853-864 (1975).
Smith, W. R., Gerard, H. M., Collins, J. H., Reeder, T. M., and Shaw, H. J., Analysis of interdigital surface wave transducers by use of an equivalent circuit model, IEEE Transactions on Microwave Theory and Techniques, 17, 856-64 (1969).
doi:10.1109/TMTT.1969.1127075
Soluch W., and Brzozowski, W., Properties of SAW delay lines on GdCa4O(BO3)3 crystal at high temperatures, Electronics Letters, 43(13), 737-738, (2007).
doi:10.1049/el:20071027
Welsch, W., Klein, C., Oksuzoglu, R.M., von Schickfus, M., Hunklinger, S., Immunosensing with surface acoustic wave sensors, Sensors and Actuators, 562-564 (1997).
doi:10.1016/S0924-4247(97)01569-0
Waldemar Soluch, Design of SAW delay line for sensors, Sensors and Actuators A, 67, 60-64 (1998). doi:10.1016/S0924-4247(97)01737-8 Weld, C. E., Sternhagen. J. D., Mileham, R. D., Mitzner, K. D., Galipeau, D. W., IEEE Ultrasonics Symposium, 441-444 (1999).
White, R. M. and Voltmer, F. W., Direct piezoelectric coupling to surface elastic waves, Applied Physics Letters, 7, 314-316 (1965).
doi:10.1063/1.1754276
Xiangwen Zhang and Fei-Yue Wang, Key technologies of passive wireless sensor networks based on surface acoustic wave resonators, IEEE International Conference on Networking, Sensing and Control, 1253-1258 (2007).
Xiaojun Tong, De Zhang, Novel propogation direction of quasi longitudinal leaky surface acoustic wave on quartz and its potential as liquid sensors, Sensors and Actuators A, 160-162 (1999).
doi:10.1016/S0924-4247(99)00221-6
