TY - JOUR TI - Process Development for Fabrication of Photomasks using LASER Pattern Generator AU - A. B. Dhaulakhandi AU - S. K. Koul AU - Shyamli Thakur AU - M. U. Sharma AU - Dinesh Kumar PY - 2015 DO - 10.13074/jent.2015.09.153162 T2 - Journal of Environmental Nanotechnology JF - Journal of Environmental Nanotechnology JA - J. Environ. Nanotechnol. SP - 32 EP - 36 VL - 4 IS - 3 PB - Institute for Environmental Nanotechnology ER -