%0 Journal Article
%T Process Development for Fabrication of Photomasks using  LASER Pattern Generator
%A  A. B. Dhaulakhandi 
%A S. K. Koul 
%A Shyamli Thakur 
%A M. U. Sharma 
%A Dinesh Kumar
%D 2015
%R 10.13074/jent.2015.09.153162
%J Journal of Environmental Nanotechnology
%P 32-36
%V 4
%N 3
%I Institute for Environmental Nanotechnology
%U https://doi.org/10.13074/jent.2015.09.153162